Cantilever-Based Sensor Utilizing a Diffractive Optical Element with High Sensitivity to Relative Humidity
نویسندگان
چکیده
منابع مشابه
High-sensitivity optical humidity sensor based on a thin dielectric waveguide.
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ژورنال
عنوان ژورنال: Sensors
سال: 2021
ISSN: 1424-8220
DOI: 10.3390/s21051673